Iii-v micro-led arrays and methods for preparing the same
文献类型:专利
作者 | HWANG, DAVID; YOUNG, NATHAN G.; YONKEE, BEN; SAIFADDIN, BURHAN K.; DENBAARS, STEVEN P.; SPECK, JAMES S.; NAKAMURA, SHUJI |
发表日期 | 2017-08-17 |
专利号 | US20170236807A1 |
著作权人 | THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
国家 | 美国 |
文献子类 | 发明申请 |
其他题名 | Iii-v micro-led arrays and methods for preparing the same |
英文摘要 | III-V micro light-emitting diodes (LEDs) are fabricated using a photoelectrochemical (PEC) etch. A sacrificial layer and III-V device layers are epitaxially grown on a host substrate, wherein the III-V device layers are patterned to form the micro-LEDs. The sacrificial layer is removed by a photoelectrochemical (PEC) etch, so as to fully or partially separate the micro-LEDs from the substrate, before or after the micro-LEDs are bonded to a submount or intermediate substrate. The micro-LEDs may be bonded to a submount with a polymer film deposited thereon, wherein the polymer film with the micro-LEDs is subsequently delaminated from the submount. Alternatively, the intermediate substrate may be a transfer medium, wherein the micro-LEDs are separated from the host substrate by mechanical fracturing, and then bonded to a second substrate, after which the intermediate substrate is removed, wherein a third substrate may be bonded to exposed surfaces of the transferred micro-LEDs. |
公开日期 | 2017-08-17 |
申请日期 | 2017-04-28 |
状态 | 申请中 |
源URL | [http://ir.opt.ac.cn/handle/181661/54785] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
推荐引用方式 GB/T 7714 | HWANG, DAVID,YOUNG, NATHAN G.,YONKEE, BEN,et al. Iii-v micro-led arrays and methods for preparing the same. US20170236807A1. 2017-08-17. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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