中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Iii-v micro-led arrays and methods for preparing the same

文献类型:专利

作者HWANG, DAVID; YOUNG, NATHAN G.; YONKEE, BEN; SAIFADDIN, BURHAN K.; DENBAARS, STEVEN P.; SPECK, JAMES S.; NAKAMURA, SHUJI
发表日期2017-08-17
专利号US20170236807A1
著作权人THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
国家美国
文献子类发明申请
其他题名Iii-v micro-led arrays and methods for preparing the same
英文摘要III-V micro light-emitting diodes (LEDs) are fabricated using a photoelectrochemical (PEC) etch. A sacrificial layer and III-V device layers are epitaxially grown on a host substrate, wherein the III-V device layers are patterned to form the micro-LEDs. The sacrificial layer is removed by a photoelectrochemical (PEC) etch, so as to fully or partially separate the micro-LEDs from the substrate, before or after the micro-LEDs are bonded to a submount or intermediate substrate. The micro-LEDs may be bonded to a submount with a polymer film deposited thereon, wherein the polymer film with the micro-LEDs is subsequently delaminated from the submount. Alternatively, the intermediate substrate may be a transfer medium, wherein the micro-LEDs are separated from the host substrate by mechanical fracturing, and then bonded to a second substrate, after which the intermediate substrate is removed, wherein a third substrate may be bonded to exposed surfaces of the transferred micro-LEDs.
公开日期2017-08-17
申请日期2017-04-28
状态申请中
源URL[http://ir.opt.ac.cn/handle/181661/54785]  
专题半导体激光器专利数据库
作者单位THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
推荐引用方式
GB/T 7714
HWANG, DAVID,YOUNG, NATHAN G.,YONKEE, BEN,et al. Iii-v micro-led arrays and methods for preparing the same. US20170236807A1. 2017-08-17.

入库方式: OAI收割

来源:西安光学精密机械研究所

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