Cantilevers with one-or two-dimensional actuation for on-chip active waveguide coupling alignment
文献类型：专利
| 作者 | DOERR, CHRISTOPHER; CHEN, LI; CHEN, LONG |
| 发表日期 | 2018-01-04 |
| 专利号 | WO2018005959A1 |
| 著作权人 | ACACIA COMMUNICATIONS, INC. |
| 国家 | 世界知识产权组织 |
| 文献子类 | 发明申请 |
| 其他题名 | Cantilevers with one-or two-dimensional actuation for on-chip active waveguide coupling alignment |
| 英文摘要 | Photonic integrated circuits including controllable cantilevers are described. Such photonic integrated circuits may be used in connection with other optical devices, in which light is transferred between the photonic integrated circuit and one of these optical device. The photonic integrated circuit (302) may comprise an optical waveguide (316) having an end disposed proximate to a facet of the cantilever (312). The orientation of the cantilever (312) may be actively controlled in one or two dimensions, thus adjusting the orientation of the optical waveguide (316). Actuation (318) of the cantilever may be performed, for example, thermally and/or electrostatically. Orientation of the cantilever may be performed in such a way to align the optical waveguide with an optical device (326) |
| 公开日期 | 2018-01-04 |
| 申请日期 | 2017-06-30 |
| 状态 | 未确认 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/54798]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | ACACIA COMMUNICATIONS, INC. |
| 推荐引用方式 GB/T 7714 | DOERR, CHRISTOPHER,CHEN, LI,CHEN, LONG. Cantilevers with one-or two-dimensional actuation for on-chip active waveguide coupling alignment. WO2018005959A1. 2018-01-04. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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