MEMS steering mirrors for applications in photonic integrated circuits
文献类型：专利
| 作者 | YASUMURA, KEVIN Y.; VERSLEGERS, LIEVEN; BERGER, JILL D. |
| 发表日期 | 2018-12-05 |
| 专利号 | EP3410166A1 |
| 著作权人 | GOOGLE LLC |
| 国家 | 欧洲专利局 |
| 文献子类 | 发明申请 |
| 其他题名 | MEMS steering mirrors for applications in photonic integrated circuits |
| 英文摘要 | An integrated optical assembly includes an optics mount. The optics mount has disposed thereon a light source for providing a beam of light and a lens configured to focus the beam of light. The integrated optical assembly includes a photonic integrated circuit (PIC) mechanically coupled to the optics mount. The PIC has disposed thereon a grating coupler for receiving the beam of light and coupling the beam of light into a waveguide. The integrated optical assembly includes a microelectromechanical systems (MEMS) mirror configured to receive the beam of light from the lens and redirect it towards the grating coupler. A position of a reflective portion of the MEMS mirror is adjustable to affect an angle of incidence of the beam of light on the grating coupler. |
| 公开日期 | 2018-12-05 |
| 申请日期 | 2018-04-10 |
| 状态 | 申请中 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/54887]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | GOOGLE LLC |
| 推荐引用方式 GB/T 7714 | YASUMURA, KEVIN Y.,VERSLEGERS, LIEVEN,BERGER, JILL D.. MEMS steering mirrors for applications in photonic integrated circuits. EP3410166A1. 2018-12-05. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。