Vertical cavity surface emitting laser device with integrated tunnel junction
文献类型：专利
| 作者 | WEICHMANN, ULRICH; SCHEMMANN, MARCEL FRANZ CHRISTIAN |
| 发表日期 | 2019-09-18 |
| 专利号 | EP3540879A1 |
| 著作权人 | KONINKLIJKE PHILIPS N.V. |
| 国家 | 欧洲专利局 |
| 文献子类 | 发明申请 |
| 其他题名 | Vertical cavity surface emitting laser device with integrated tunnel junction |
| 英文摘要 | The invention describes a Vertical Cavity Surface Emitting Laser (VCSEL) device (100). The VCSEL device (100) comprises a first electrical contact (105), a second electrical contact (150) and an optical resonator. The optical resonator comprises a first distributed Bragg reflector (115), a second distributed Bragg reflector (125) and an active layer (120) for light emission. The active layer (120) is arranged between the first distributed Bragg reflector (115) and the second distributed Bragg reflector (125). Either the first distributed Bragg reflector (115) or the second distributed Bragg reflector (125) comprises a first part (115-1, 125-1) with at least one pair of layers with different refractive indices and a second part (115-2, 125-2) with at least one pair of layers with different refractive indices. The first part (115-1, 125-1) and the second part (115-2, 125-2) are characterized by different conductivity types. A tunnel junction (130) is arranged between the first part (115-1, 125-1) and the second part (115-2, 125-2). The first electrical contact (105) and the second electrical contact (150) are arranged to electrically pump the optical resonator such that the tunnel junction (130) is reversely biased during operation of the VCSEL device (100). The invention further relates an optical sensor and a time-of-flight sensor module (200) comprising such a VCSEL device (100). The invention finally relates to a corresponding method of fabricating such a VCSEL device. |
| 公开日期 | 2019-09-18 |
| 申请日期 | 2018-03-15 |
| 状态 | 申请中 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/55536]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | KONINKLIJKE PHILIPS N.V. |
| 推荐引用方式 GB/T 7714 | WEICHMANN, ULRICH,SCHEMMANN, MARCEL FRANZ CHRISTIAN. Vertical cavity surface emitting laser device with integrated tunnel junction. EP3540879A1. 2019-09-18. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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