中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Multi stack optical elements using temporary and permanent bonding

文献类型:专利

作者GODET, LUDOVIC; MCMILLAN, WAYNE; MEYER TIMMERMAN THIJSSEN, RUTGER; ARGAMAN, NAAMAH; ROY, TAPASHREE; DOSHAY, SAGE
发表日期2019-10-17
专利号US20190318957A1
著作权人APPLIED MATERIALS, INC.
国家美国
文献子类发明申请
其他题名Multi stack optical elements using temporary and permanent bonding
英文摘要Systems and methods herein are related to the formation of optical devices including stacked optical element layers using silicon wafers, glass, or devices as substrates. The optical elements discussed herein can be fabricated on temporary or permanent substrates. In some examples, the optical devices are fabricated to include transparent substrates or devices including charge-coupled devices (CCD), or complementary metal-oxide semiconductor (CMOS) image sensors, light-emitting diodes (LED), a micro-LED (uLED) display, organic light-emitting diode (OLED) or vertical-cavity surface-emitting laser (VCSELs). The optical elements can have interlayers formed in between optical element layers, where the interlayers can range in thickness from 1 nm to 3 mm.
公开日期2019-10-17
申请日期2019-02-22
状态申请中
源URL[http://ir.opt.ac.cn/handle/181661/57266]  
专题半导体激光器专利数据库
作者单位APPLIED MATERIALS, INC.
推荐引用方式
GB/T 7714
GODET, LUDOVIC,MCMILLAN, WAYNE,MEYER TIMMERMAN THIJSSEN, RUTGER,et al. Multi stack optical elements using temporary and permanent bonding. US20190318957A1. 2019-10-17.

入库方式: OAI收割

来源:西安光学精密机械研究所

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