Waveguide structure and preparation method
文献类型：专利
| 作者 | ZHOU, LIBING; LI, WEISHI |
| 发表日期 | 2017-10-13 |
| 专利号 | IN201714013051A |
| 著作权人 | HUAWEI TECHNOLOGIES CO., LTD. |
| 国家 | 印度 |
| 文献子类 | 发明申请 |
| 其他题名 | Waveguide structure and preparation method |
| 英文摘要 | The present invention discloses a waveguide structure, including a silicon substrate layer, a silicon waveguide layer, a first silicon dioxide layer, a silicide waveguide layer, and a second silicon dioxide layer, where the silicon substrate layer, the silicon waveguide layer, the first silicon dioxide layer, the silicide waveguide layer, and the second silicon dioxide layer are stacked in sequence, the silicon waveguide layer is a conical waveguide layer, the silicon waveguide layer and the silicide waveguide layer are coupled by using an evanescent wave, the silicide waveguide layer includes multiple first waveguide blocks and multiple second waveguide blocks, a material of the first waveguide blocks is the same as a material of the silicide waveguide layer, a refractive index of a material of the second waveguide blocks is lower than a refractive index of the material of the first waveguide blocks, sizes of the multiple first waveguide blocks and the multiple second waveguide blocks increase gradually in a light output direction of the waveguide structure, and an optical signal enters the silicide waveguide layer from the silicon waveguide layer through an evanescent wave. By using the waveguide structure in embodiments of the present invention, a waveguide flare size can be increased, so as to match a mode size of a fiber core of an optical fiber. |
| 公开日期 | 2017-10-13 |
| 申请日期 | 2017-04-11 |
| 状态 | 未确认 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/57571]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | HUAWEI TECHNOLOGIES CO., LTD. |
| 推荐引用方式 GB/T 7714 | ZHOU, LIBING,LI, WEISHI. Waveguide structure and preparation method. IN201714013051A. 2017-10-13. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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