High-q optical resonator with monolithically integrated waveguide
文献类型：专利
| 作者 | VAHALA, KERRY; YANG, KIYOUL; OH, DONG YOON; LEE, SEUNG HOON |
| 发表日期 | 2018-01-04 |
| 专利号 | US20180006424A1 |
| 著作权人 | CALIFORNIA INSTITUTE OF TECHNOLOGY |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | High-q optical resonator with monolithically integrated waveguide |
| 英文摘要 | A ring optical resonator is formed on a substrate. An outer circumferential surface of the resonator substantially confines one or more circumferential resonant optical modes. The resonator is positioned above a void formed in the substrate and is supported above the void by a portion of a material layer on the substrate that extends radially inward above the void from an outer circumferential edge of the void to the outer circumferential surface of the resonator. An optical waveguide can be integrally formed on the substrate and traverses a portion of the material layer above the void. The optical waveguide and the ring optical resonator are arranged and positioned so as to establish evanescent optical coupling between them. Q-factors of 108 or more have been achieved with a silica resonator and silicon nitride waveguide integrally formed on a silicon substrate. |
| 公开日期 | 2018-01-04 |
| 申请日期 | 2017-05-05 |
| 状态 | 申请中 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/57579]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CALIFORNIA INSTITUTE OF TECHNOLOGY |
| 推荐引用方式 GB/T 7714 | VAHALA, KERRY,YANG, KIYOUL,OH, DONG YOON,et al. High-q optical resonator with monolithically integrated waveguide. US20180006424A1. 2018-01-04. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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