Very narrow band excimer or molecular fluorine laser
文献类型：专利
| 作者 | KLEINSCHMIDT, JURGEN; HEIST, PETER; STAMM, UWE; ZSCHOCKE, WOLFGANG; GOVORKOV, SERGEI V. |
| 发表日期 | 2002-12-12 |
| 专利号 | US20020186741A1 |
| 著作权人 | LAMBDA PHYSIK AG |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Very narrow band excimer or molecular fluorine laser |
| 英文摘要 | An excimer or molecular fluorine laser system generates a laser output bandwidth of less than 0.6 pm, and preferably 0.5-0.4 pm or less. The laser resonator has a line-narrowing unit preferably including a grating, and preferably also a beam expander, and may include one or more etalons or other interferometric devices. The grating may be preferably a blazed grating having a blaze angle greater than 76°, and is preferably around 80°. The grating structure is preferably defined by the surface of the grating substrate. The substrate is preferably aluminum. The system may further include an amplifier for increasing the energy of the sub-0.6 nm output beam. |
| 公开日期 | 2002-12-12 |
| 申请日期 | 2002-04-01 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/60816]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | LAMBDA PHYSIK AG |
| 推荐引用方式 GB/T 7714 | KLEINSCHMIDT, JURGEN,HEIST, PETER,STAMM, UWE,et al. Very narrow band excimer or molecular fluorine laser. US20020186741A1. 2002-12-12. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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