Multiple band pass filtering for pyrometry in laser based annealing systems
文献类型：专利
| 作者 | ADAMS, BRUCE, E.; JENNINGS, DEAN; HUNTER, AARON, M.; MAYUR, ABHILASH, J.; PARIHAR, VIJAY; THOMAS, TIMOTHY, N. |
| 发表日期 | 2007-09-12 |
| 专利号 | EP1831658A2 |
| 著作权人 | APPLIED MATERIALS, INC. |
| 国家 | 欧洲专利局 |
| 文献子类 | 发明申请 |
| 其他题名 | Multiple band pass filtering for pyrometry in laser based annealing systems |
| 英文摘要 | A thermal processing system includes a source of laser radiation emitting at a laser wavelength, beam projection optics disposed between the reflective surface and a substrate support capable of holding a substrate to be processed, a pyrometer responsive to a pyrometer wavelength, and a wavelength responsive optical element having a first optical path for light in a first wavelength range including the laser wavelength, the first optical path being between the source of laser radiation and the beam projection optics, and a second optical path for light in a second wavelength range including the pyrometer wavelength, the second optical path being between the beam projection optics and the pyrometer. The system can further include a pyrometer wavelength blocking filter between the source of laser radiation and the wavelength responsive optical element. |
| 公开日期 | 2007-09-12 |
| 申请日期 | 2005-10-12 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/61273]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | APPLIED MATERIALS, INC. |
| 推荐引用方式 GB/T 7714 | ADAMS, BRUCE, E.,JENNINGS, DEAN,HUNTER, AARON, M.,et al. Multiple band pass filtering for pyrometry in laser based annealing systems. EP1831658A2. 2007-09-12. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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