Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element
文献类型:专利
作者 | HIGASHI, YASUHIRO; HARASAKA, KAZUHIRO |
发表日期 | 2012-04-12 |
专利号 | US20120086765A1 |
著作权人 | RICOH COMPANY, LTD. |
国家 | 美国 |
文献子类 | 发明申请 |
其他题名 | Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element |
英文摘要 | A method of manufacturing a surface-emitting laser element having a light-emitting mesa structure with an emitting area including a high-reflectance portion and a low-reflectance portion includes forming a layered body that includes a lower reflecting mirror, a cavity structure, and an upper reflecting mirror on a substrate; forming a first area on an upper surface of the layered body; forming a second area having the same size as the first area on the upper surface of the layered body; forming a light-emitting mesa structure and a monitoring-mesa structure by etching the first area and the second area, respectively; forming a confinement structure including a current passage area surrounded by an oxide in the light-emitting mesa structure and the monitoring-mesa structure; and measuring the size of the current passage area of the monitoring-mesa structure. |
公开日期 | 2012-04-12 |
申请日期 | 2010-05-26 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/61638] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | RICOH COMPANY, LTD. |
推荐引用方式 GB/T 7714 | HIGASHI, YASUHIRO,HARASAKA, KAZUHIRO. Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element. US20120086765A1. 2012-04-12. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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