Light irradiation apparatus and drawing apparatus
文献类型：专利
| 作者 | FURUYA, YOSHIO; KOKUBO, MASAHIKO; KITAMURA, FUJIKAZU; SASADA, MASAKI |
| 发表日期 | 2016-11-30 |
| 专利号 | EP3098017A1 |
| 著作权人 | SCREEN HOLDINGS CO., LTD. |
| 国家 | 欧洲专利局 |
| 文献子类 | 发明申请 |
| 其他题名 | Light irradiation apparatus and drawing apparatus |
| 英文摘要 | A light irradiation apparatus (31) includes a light source unit (40) and an irradiation optical system (5). In the light source unit, light source parts (4) arrayed in a plane emit laser light toward the irradiation optical system from different directions along the plane, and by the irradiation optical system, the laser light is guided along an optical axis (J1) to an irradiation plane (320). The irradiation optical system includes a division lens part (62), an optical path length difference generation part (61), and a condensing lens part (63). The division lens part includes element lenses (620) that divide light incident from the light source parts. The optical path length difference generation part includes transparent parts (610) having different optical path lengths from each other, and light that has passed through the element lenses respectively enters the transparent parts. The condensing lens part superimposes irradiation regions (50) of the light from the transparent parts on each other on the irradiation plane. Accordingly, the irradiation plane can be irradiated with high-intensity light having a uniform intensity distribution. |
| 公开日期 | 2016-11-30 |
| 申请日期 | 2015-05-29 |
| 状态 | 申请中 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/62020]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SCREEN HOLDINGS CO., LTD. |
| 推荐引用方式 GB/T 7714 | FURUYA, YOSHIO,KOKUBO, MASAHIKO,KITAMURA, FUJIKAZU,et al. Light irradiation apparatus and drawing apparatus. EP3098017A1. 2016-11-30. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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