Tunable Fabry-Perot microelectromechanical resonator with optical power-dependent tuning
文献类型：专利
| 作者 | TUCKER, RODNEY S.; SORIN, WAYNE V. |
| 发表日期 | 2002-05-08 |
| 专利号 | EP1204181A2 |
| 著作权人 | AGILENT TECHNOLOGIES, INC. (A DELAWARE CORPORATION) |
| 国家 | 欧洲专利局 |
| 文献子类 | 发明申请 |
| 其他题名 | Tunable Fabry-Perot microelectromechanical resonator with optical power-dependent tuning |
| 英文摘要 | A tunable optical resonator[100] constructed from a fixed mirror[14] and a moveable mirror[13]. The fixed mirror[14] is attached to a substrate having a first electrically conducting surface. A support member[15-18] having the moveable mirror[13] supported thereon and a second electrically conducting surface is suspended above the substrate such that the moveable mirror[13] is separated from the fixed mirror[14]. A light output port[13] transmits a light signal of a wavelength determined by the distance between the fixed and moveable mirrors[13]. An optical circuit[102,104] measures the power level of the light signal and generates an electrical signal that depends on the measured power level. A frequency adjustment circuit[106,120], responsive to the electrical signal and a tuning voltage, applies an electrical potential between the first and second electrically conducting surfaces. The electrical potential causes the distance to remain at a distance determined by the tuning voltage independent of the power level for power levels less than a predetermined power level. |
| 公开日期 | 2002-05-08 |
| 申请日期 | 2001-07-11 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/62469]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AGILENT TECHNOLOGIES, INC. (A DELAWARE CORPORATION) |
| 推荐引用方式 GB/T 7714 | TUCKER, RODNEY S.,SORIN, WAYNE V.. Tunable Fabry-Perot microelectromechanical resonator with optical power-dependent tuning. EP1204181A2. 2002-05-08. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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