Optical displacement-detecting mechanism and probe microscope using the same
文献类型:专利
作者 | IYOKI, MASATO; YAMAMOTO, HIROYOSHI; WATANABE, KAZUTOSHI |
发表日期 | 2008-02-28 |
专利号 | US20080049223A1 |
著作权人 | HITACHI HIGH-TECH SCIENCE CORPORATION |
国家 | 美国 |
文献子类 | 发明申请 |
其他题名 | Optical displacement-detecting mechanism and probe microscope using the same |
英文摘要 | The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise. |
公开日期 | 2008-02-28 |
申请日期 | 2007-08-17 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/62517] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | HITACHI HIGH-TECH SCIENCE CORPORATION |
推荐引用方式 GB/T 7714 | IYOKI, MASATO,YAMAMOTO, HIROYOSHI,WATANABE, KAZUTOSHI. Optical displacement-detecting mechanism and probe microscope using the same. US20080049223A1. 2008-02-28. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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