Device for adjusting angle of oscillation surface of semiconductor laser element
文献类型：专利
| 作者 | KITSUKAWA MASAO; IMANARI SHIYUNICHI |
| 发表日期 | 1984-12-12 |
| 专利号 | JP1984220986A |
| 著作权人 | TOUKIYOU SOKUHAN KK |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Device for adjusting angle of oscillation surface of semiconductor laser element |
| 英文摘要 | PURPOSE:To enhace the productivity of the titled device by automatically adjusting the angle by a method wherein a needle to adsorb the element is mounted to a bonding head in a rotatable manner, and an optical device which performs photo irradiation to the mirror surface of the element and receives the reflected light is provided in opposition of a bed, thus detecting the angle of the mirror surface. CONSTITUTION:A slide 21 moving freely in X-Y directions by means of a guide rail 2 is provided on the bed 1, the bondig head 13 being installed thereon. An arm 14 is projected out of the head, and the tip of the arm is provided with the needle 7 rotating freely by means of a motor 32. A chip train 5 containing the element whose angle is to be detected is arranged under the needle 7, and an X-Y table 36 positioned thereunder is rotated by means of a motor 34. Further, the optical device via stand 41 is arranged along the train. Then, the angle of the oscillation surface of the element adsorbed to the needle 7 is detected by means of the device 40 and corrected, which is determined through a scope 37 for pattern recognition and through a TV camera 38. |
| 公开日期 | 1984-12-12 |
| 申请日期 | 1983-05-31 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/62886]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | TOUKIYOU SOKUHAN KK |
| 推荐引用方式 GB/T 7714 | KITSUKAWA MASAO,IMANARI SHIYUNICHI. Device for adjusting angle of oscillation surface of semiconductor laser element. JP1984220986A. 1984-12-12. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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