Light emitting device module and manufacture thereof
文献类型：专利
| 作者 | NAKANO JUNICHI; FUKUDA MITSUO; UEKI MINEO; TSUZUKI NOBUYORI |
| 发表日期 | 1988-06-13 |
| 专利号 | JP1988140589A |
| 著作权人 | NIPPON TELEGR & TELEPH CORP |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Light emitting device module and manufacture thereof |
| 英文摘要 | PURPOSE:To enhance the optical coupling efficiency by providing a light emitting device formed on an InP substrate, an optical part installing groove formed on the substrate, and an optical part mounted in the groove in such a manner that all the sidewalls of the grooves perpendicularly cross the main surface of the substrate. CONSTITUTION:A component of a light emitting device 22 which contains an active layer 23 is formed on the main surface of an InP crystal substrate 21, and the whole surface is covered in this state with a mask layer 5 Then, a part 52 corresponding to the groove to be engaged with an optical part 53 is opened by lithography and RIE. Then, gas in which BBr3 and O2 gases are mixed at the flow rate ratio of 1:1 is introduced to an RIE unit, a substrate is heated to form grooves. Then, a mask layer 51b covering the electrode 50 of the device 22 is further processed to remove part 51c to form the device light emitting surface of the device to be opened. Thereafter, in order to form the light emitting surface of the device, it is etched. Subsequently, the part 53 is engaged within the groove and bonded by an adhesive. |
| 公开日期 | 1988-06-13 |
| 申请日期 | 1986-12-02 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/63054]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NIPPON TELEGR & TELEPH CORP |
| 推荐引用方式 GB/T 7714 | NAKANO JUNICHI,FUKUDA MITSUO,UEKI MINEO,et al. Light emitting device module and manufacture thereof. JP1988140589A. 1988-06-13. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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