Manufacture of optical device
文献类型：专利
| 作者 | TSUKIKI KAZUNORI |
| 发表日期 | 1988-10-03 |
| 专利号 | JP1988237491A |
| 著作权人 | SONY CORP |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Manufacture of optical device |
| 英文摘要 | PURPOSE:To improve the mass-productivity by excluding troublesome works wherein each prism is formed by polishing one by one which is bonded to a semiconductor wafer or a semiconductor substrate one by one, by bonding a transparent wafer, in which many prisms are unified in a body, to a semiconductor wafer, and applying a pelletizing process to the unified transparent wafer and the semiconductor wafer. CONSTITUTION:A transparent resin is subjected to a molding process to form a transparent wafer 11, When is bonded to a semiconductor wafer 10 after positioning. An unnecessary part 20 of the transparent wafer 11 is eliminated by cutting and the like. Then, the semiconductor wafer 10 and the transparent wafer 10, which is bonded to the semiconductor wafer and whose unnecessary part is eliminated, are subjected to a pelletizing process. Thereby, an optical device is obtained wherein a prism 7 is bonded to a region to form photo detectors 2 and 3. According to this method, troublesome works wherein each prism is formed by polishing one by one which is bonded to the semiconductor substrate 1 after positioning one by one can be excluded, and the manufacturing method of many optical devices with little manhour is enabled by a batch processing. Consequently, many optical devices of low cost can be supplied. |
| 公开日期 | 1988-10-03 |
| 申请日期 | 1987-03-25 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/63075]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SONY CORP |
| 推荐引用方式 GB/T 7714 | TSUKIKI KAZUNORI. Manufacture of optical device. JP1988237491A. 1988-10-03. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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