Method for fabricating oxide-confined vertical-cavity surface-emitting laser
文献类型：专利
| 作者 | PAN, JIN SHAN; WU, CHENG JU; WU, I HAN; TSENG, KUO FONG |
| 发表日期 | 2011-04-14 |
| 专利号 | US20110086449A1 |
| 著作权人 | TRUELIGHT CORPORATION |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Method for fabricating oxide-confined vertical-cavity surface-emitting laser |
| 英文摘要 | The present invention discloses a method for fabricating a heat-resistant, humidity-resistant oxide-confined vertical-cavity surface-emitting laser (VCSEL) by slowing down the oxidizing rate during a VCSEL oxidation process to thereby reduce stress concentration of an oxidation layer and by preventing moisture invasion using a passivation layer disposed on a laser window. The VCSEL device thus fabricated is heat-resistant, humidity-resistant, and highly reliable. In a preferred embodiment, the oxidation process takes place at an oxidizing rate of less than 0.4 μm/min, and the passivation layer is a SiON passivation layer. |
| 公开日期 | 2011-04-14 |
| 申请日期 | 2009-12-11 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/63228]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | TRUELIGHT CORPORATION |
| 推荐引用方式 GB/T 7714 | PAN, JIN SHAN,WU, CHENG JU,WU, I HAN,et al. Method for fabricating oxide-confined vertical-cavity surface-emitting laser. US20110086449A1. 2011-04-14. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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