Wavelength-tunable vertical cavity surface emitting laser for swept source optical coherence tomography system
文献类型：专利
| 作者 | MAKINO, TOSHIHIKO; LI, TONGNING; EU, DAVID |
| 发表日期 | 2016-05-11 |
| 专利号 | EP3017515A1 |
| 著作权人 | INPHENIX, INC. |
| 国家 | 欧洲专利局 |
| 文献子类 | 发明申请 |
| 其他题名 | Wavelength-tunable vertical cavity surface emitting laser for swept source optical coherence tomography system |
| 英文摘要 | A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of micro-electromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz. |
| 公开日期 | 2016-05-11 |
| 申请日期 | 2014-07-01 |
| 状态 | 申请中 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/63367]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | INPHENIX, INC. |
| 推荐引用方式 GB/T 7714 | MAKINO, TOSHIHIKO,LI, TONGNING,EU, DAVID. Wavelength-tunable vertical cavity surface emitting laser for swept source optical coherence tomography system. EP3017515A1. 2016-05-11. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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