Oct system with bonded MEMS tunable mirror vcsel swept source
文献类型：专利
| 作者 | FLANDERS DALE C.; KUZNETSOV MARK E.; ATIA WALID A.; JOHNSON BARTLEY C. |
| 发表日期 | 2014-06-26 |
| 专利号 | CA2891979A1 |
| 著作权人 | AXSUN TECHNOLOGIES, INC. |
| 国家 | 加拿大 |
| 文献子类 | 发明申请 |
| 其他题名 | Oct system with bonded MEMS tunable mirror vcsel swept source |
| 英文摘要 | A microelectromechanical systems (MEMS)-tunable vertical-cavity surfaceemitting laser (VCSEL) in which the MEMS mirror is a bonded to the active region. This allows for a separate electrostatic cavity, that is outside the laser's optical resonant cavity. Moreover, the use of this cavity configuration allows the MEMS mirror to be tuned by pulling the mirror away from the active region. This reduces the risk of snap down. Moreover, since the MEMS mirror is now bonded to the active region, much wider latitude is available in the technologies that are used to fabricate the MEMS mirror. This is preferably deployed as a swept source in an optical coherence tomography (OCT) system. |
| 公开日期 | 2014-06-26 |
| 申请日期 | 2013-12-20 |
| 状态 | 申请中 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/63786]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AXSUN TECHNOLOGIES, INC. |
| 推荐引用方式 GB/T 7714 | FLANDERS DALE C.,KUZNETSOV MARK E.,ATIA WALID A.,et al. Oct system with bonded MEMS tunable mirror vcsel swept source. CA2891979A1. 2014-06-26. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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