Moisture passivated planar index-guided VCSEL
文献类型：专利
| 作者 | WIDJAJA, WILSON H.; HU, FRANK |
| 发表日期 | 2004-07-15 |
| 专利号 | US20040136426A1 |
| 著作权人 | EPISTAR CORPORATION |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Moisture passivated planar index-guided VCSEL |
| 英文摘要 | Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELS) are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used to form the index-guiding confinement regions. In one aspect, the invention features a VCSEL that includes a vertical stack structure having a substantially planar top surface. The vertical stack structure includes a top mirror, a bottom mirror, and a cavity region that is disposed between the top mirror and the bottom mirror and includes an active light generation region. At least one of the top mirror and the bottom mirror has a layer with a peripheral region that is oxidized into an electrical insulator. The vertical stack structure defines an etched hole that extends from the substantially planar top surface to the oxidized peripheral region. The etched hole contains a polymer layer and is moisture passivated by an overlying moisture penetration barrier. |
| 公开日期 | 2004-07-15 |
| 申请日期 | 2003-01-13 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/63810]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | EPISTAR CORPORATION |
| 推荐引用方式 GB/T 7714 | WIDJAJA, WILSON H.,HU, FRANK. Moisture passivated planar index-guided VCSEL. US20040136426A1. 2004-07-15. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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