Semiconductor laser fitted with monitor
文献类型：专利
| 作者 | SAITO HIDEHO |
| 发表日期 | 1992-01-21 |
| 专利号 | JP1992015978A |
| 著作权人 | 日本電信電話株式会社 |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Semiconductor laser fitted with monitor |
| 英文摘要 | PURPOSE:To facilitate manufacture by providing etching grooves, which reach the clad layer on substrate site, on both sides of a stripe-shaped active region, and forming a mesa, which includes the active region of a photodiode part, in the shape of a taper where the width near a laser part is wide and the width far from it is narrow, and specifying the angle theta of a taper within some range, and forming the side of the mesa, which includes the active region, vertically to the plane of a substrate. CONSTITUTION:Etching grooves 13, which reach the clad layers 2 on the side of a substrate, are provided in nearly parallel with stripes on both sides of a mesa 11, which includes a stripe-shaped active region. And the widths of the mesa 11, which includes the striped-shaped active region of a photodiode part 9, are made wide on the side where it is near to a laser part 8 and narrow on the side where it is far from it, whereby it is made into the shape of a taper 14, and the taper angle theta of this taper part 14 is put in the range of 0<=theta<=80 deg., and the side face of this mesa 11 is made vertical to the plane of the substrate, using the vertical etching technology by dry etching such as RIE, etc. |
| 公开日期 | 1992-01-21 |
| 申请日期 | 1990-05-09 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/64053]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | 日本電信電話株式会社 |
| 推荐引用方式 GB/T 7714 | SAITO HIDEHO. Semiconductor laser fitted with monitor. JP1992015978A. 1992-01-21. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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