A semiconductor optical device and a fabricating method therefor
文献类型:专利
作者 | NAGAI, YUTAKA, C/O MITSUBISHI DENKI K.K.; TAKEMOTO, AKIRA, C/O MITSUBISHI DENKI K.K.; WATANABE, HITOSHI, C/O MITSUBISHI DENKI K.K. |
发表日期 | 1992-05-20 |
专利号 | EP0486128A2 |
著作权人 | MITSUBISHI DENKI KABUSHIKI KAISHA |
国家 | 欧洲专利局 |
文献子类 | 发明申请 |
其他题名 | A semiconductor optical device and a fabricating method therefor |
英文摘要 | A semiconductor optical element includes a semiconductor substrate or a semiconductor layer formed on a semiconductor substrate; a plurality of stripe-shaped grooves each having a rectangular cross-section whose width is sufficiently narrow to occur a quantum effect, formed on the semiconductor substrate or the semiconductor layer in parallel with each other at an interval sufficiently narrow to occur a quantum effect or a plurality of rectangular-shaped grooves having a width and a length sufficiently narrow to occur a quantum effect, formed on the semiconductor substrate or the semiconductor layer in a checkered arrangement; and a structure in which a quantum well layer whose thickness is less than the depth of the groove and sufficiently thin to occur a quantum effect and a barrier layer whose thickness is larger than the depth of the groove are alternatively laminated, which structure is provided on the bottom surfaces of the grooves and regions between the adjacent grooves. As a result, an active region comprising a plurality of quantum wires or quantum boxes can be obtained by a simple production process. In addition, this quantum wire or quantum box structure can be employed for an active region of a ridge type semiconductor laser, an inner stripe type semiconductor laser or the like. |
公开日期 | 1992-05-20 |
申请日期 | 1991-05-28 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/64156] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | MITSUBISHI DENKI KABUSHIKI KAISHA |
推荐引用方式 GB/T 7714 | NAGAI, YUTAKA, C/O MITSUBISHI DENKI K.K.,TAKEMOTO, AKIRA, C/O MITSUBISHI DENKI K.K.,WATANABE, HITOSHI, C/O MITSUBISHI DENKI K.K.. A semiconductor optical device and a fabricating method therefor. EP0486128A2. 1992-05-20. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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