Inspection of diffraction grating
文献类型：专利
| 作者 | IMAI HAJIME |
| 发表日期 | 1988-07-06 |
| 专利号 | JP1988163138A |
| 著作权人 | FUJITSU LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Inspection of diffraction grating |
| 英文摘要 | PURPOSE:To shorten inspection time while enabling accurate evaluation, by irradiating the entire surface of a circuit board with a large calibre beam of laser light to examine a diffraction light intensity distribution of the entire surface of the circuit board thus observing a diffraction light pattern thereof. CONSTITUTION:The entire surface of a circuit board 1 is irradiated with a large calibre beam of laser light 20 with a uniform intensity generated with a beam expander comprising a plurality of lenses and a diffraction light from a diffraction grating is taken with a TV camera 23 to observe. Here, the angle of incidence of the laser light is predetermined, and also the intensity I0 of an emission laser light is predetermined. Then, diffraction light intensity distribution of the circuit board is inspected from the of a picture take with the camera 23. A higher intensity of the diffraction light can be evaluated and selected from a light color part of the picture. On the other hand, when the density of the picture is uniform, the light intensity distribution does not look so clear to discriminate. The intensity of a center specified line L of a TV scan line is extracted at the bottom of the picture. The intensity thus obtained is evaluated in comparison with a reference value Is, thereby allowing a subsequent epitaxial growth on an acceptable circuit board alone. |
| 公开日期 | 1988-07-06 |
| 申请日期 | 1986-12-24 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/64331]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | FUJITSU LTD |
| 推荐引用方式 GB/T 7714 | IMAI HAJIME. Inspection of diffraction grating. JP1988163138A. 1988-07-06. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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