Production of optical waveguide and optical integrated element and production thereof
文献类型：专利
| 作者 | KATO TOMOAKI; KOMATSU YOSHIRO; SASAKI TATSUYA |
| 发表日期 | 1992-08-31 |
| 专利号 | JP1992243216A |
| 著作权人 | NEC CORP |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Production of optical waveguide and optical integrated element and production thereof |
| 英文摘要 | PURPOSE:To integrate optical elements onto the same substrate by forming a slab optical waveguide which provides an effect of confining light only in the layer thickness direction on a semiconductor substrate and forming a dielectric film thereon. CONSTITUTION:A lower clad layer 102, an optical waveguide layer 103 and an upper clad layer 104 are successively formed on the substrate 101 to constitute the slab optical waveguide. An SiO2 film 105 having a striped aperture is formed thereon. The light is confined by the optical waveguide layer 103 having the refractive index larger than the refractive index of the clad layers 102, 104 and is further confined in a transverse direction into the lower part of an undoed InP ridge layer 106 as the effective refractive index in the lower part of the ridge layer 106 is larger than the refractive index at both end parts and, therefore, this element acts as three-dimensional optical waveguides. |
| 公开日期 | 1992-08-31 |
| 申请日期 | 1991-01-17 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/64525]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NEC CORP |
| 推荐引用方式 GB/T 7714 | KATO TOMOAKI,KOMATSU YOSHIRO,SASAKI TATSUYA. Production of optical waveguide and optical integrated element and production thereof. JP1992243216A. 1992-08-31. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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