中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Manufacture of ppibh-ld

文献类型:专利

作者FUJIWARA MASATOSHI
发表日期1992-07-28
专利号JP1992206792A
著作权人MITSUBISHI ELECTRIC CORP
国家日本
文献子类发明申请
其他题名Manufacture of ppibh-ld
英文摘要PURPOSE:To make a distance between an n-clad layer and an n-block layer controllable so as to prevent fluctuation of characteristics by implanting impurities from outside before growing an n-clad layer in order to cut the n-clad layer and the n-block layer. CONSTITUTION:After growing an active layer 1 and an n-InP clad layer 5a on a p-InP substrate, mesa etching is performed in order to grow a p-InP buried layer 2, an n-InP block layer 3 and a p-InP block layer 4. Next, impurities, for instance, such as Zn to form a p-region are implanted or diffused in a tilting part. Next, the n-InP clad layer 5 and an n-InGaAs contact layer 6 are made to grow.
公开日期1992-07-28
申请日期1990-11-30
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/64530]  
专题半导体激光器专利数据库
作者单位MITSUBISHI ELECTRIC CORP
推荐引用方式
GB/T 7714
FUJIWARA MASATOSHI. Manufacture of ppibh-ld. JP1992206792A. 1992-07-28.

入库方式: OAI收割

来源:西安光学精密机械研究所

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