Distributed feedback type laser with optical guide
文献类型:专利
作者 | TOMORI YUICHI; YOSHIKUNI YUZO |
发表日期 | 1988-04-26 |
专利号 | JP1988095687A |
著作权人 | NIPPON TELEGR & TELEPH CORP |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Distributed feedback type laser with optical guide |
英文摘要 | PURPOSE:To reduce the generation of reflection and scattering and the like in a coupling section as much as possible, to improve coupling between waveguides of different kinds and to obtain a high performance laser, efficiency of which is enhanced, by forming an active waveguide layer in a distributed feedback type laser in a structure in which the active wave-guide layer is buried into an inactive external waveguide layer. CONSTITUTION:A non-doped GaInAsP active waveguide layer 32 and an n-InP buffer layer 33 are grown onto a substrate 31 in succession through an LPE growth method, and a primary grating is shaped to the n-InP buffer layer 33. Other regions are etched selectively up to the upper section of the InP substrate 31, leaving an active wave-guide region 44, thus forming inactive external waveguide regions 45 and 46. An n-GaInAsP inactive external waveguide layer 34 and an n-InP clad layer 35 are grown on the whole surface through the LPE growth method. Both sides of the active waveguide are inverted-mesa etched, and n-InP current block layers 36, p-InP current block layers 37 and p-GaInAsP layers 38 are shaped and buried into said etching regions through the LPE growth method in succession. |
公开日期 | 1988-04-26 |
申请日期 | 1986-10-13 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/64562] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | NIPPON TELEGR & TELEPH CORP |
推荐引用方式 GB/T 7714 | TOMORI YUICHI,YOSHIKUNI YUZO. Distributed feedback type laser with optical guide. JP1988095687A. 1988-04-26. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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