中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Light emitting element and its manufacture

文献类型:专利

作者TAKAHASHI YUKIO; ISHII AKIRA
发表日期1987-05-08
专利号JP1987098686A
著作权人HITACHI LTD
国家日本
文献子类发明申请
其他题名Light emitting element and its manufacture
英文摘要PURPOSE:To make it possible to cut a wafer into pieces without elongation of Au in the case where chips are manufactured by cleaving a wafer, by forming an Au electrode on a wafer surface in the manner in which the part to be cut in the direction rectangular to a resonator is made thinner than the other region on the wafer. CONSTITUTION:On the corresponding parts of anode electrode 10 to the both ends of a resonator 12, an overhang-protection layer 13 thinner than the other parts is formed. The part of wafer 14, which becomes the end part of a resonator 12 in the state of a chip when a laser chip is manufactured by cutting the wafer into pieces, is previously coated with a thin Au film. As the result of this, it does not occur that Au elongates to its utmost, becomes difficult to be cut, and overhangs like eaves in a conventional manner when the wafer 14 is cleaved along a cleavage line. Consequently, an anode electrode 10 does not hang, and the short circuit defect caused by a hanging electrode does not generate.
公开日期1987-05-08
申请日期1985-10-25
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/64586]  
专题半导体激光器专利数据库
作者单位HITACHI LTD
推荐引用方式
GB/T 7714
TAKAHASHI YUKIO,ISHII AKIRA. Light emitting element and its manufacture. JP1987098686A. 1987-05-08.

入库方式: OAI收割

来源:西安光学精密机械研究所

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