Manufacture of integrated phase-locked laser device
文献类型：专利
| 作者 | SHINOZAKI KEISUKE; FURUKAWA RYOZO; WATANABE NOZOMI |
| 发表日期 | 1990-10-12 |
| 专利号 | JP1990253681A |
| 著作权人 | OKI ELECTRIC IND CO LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Manufacture of integrated phase-locked laser device |
| 英文摘要 | PURPOSE:To obtain an integrated phase-locked laser device which facilitates a high light output power basic supermode oscillation by a method wherein, after a wet-etching treatment, a dry-etching treatment which has high anisotropy is applied to form U-shaped trenches. CONSTITUTION:Trenches 51 are formed through a process wherein a current constriction layer 13 and an anti-meltback layer 15 are successively formed on a substrate 11 to form a foundation 48 and a process wherein mask layers 25 are formed on the non-waveguiding regions 19 of the foundation 48 and, after a wet-etching treatment is applied through the mask layers 25, a dry- etching treatment is applied through the mask layers 25. Therefore, the trenches 51 can be selectively formed to the thickness direction of the substrate 11 by the dry-etching treatment, so that the disappearance of the anti-meltback layer 15 caused by the wet-etching treatment can be suppressed and dimensional fluctuations caused by the growths of various components can be suppressed. With this constitution, an integrated phase-locked laser device which facilitates a high light output can be obtained. |
| 公开日期 | 1990-10-12 |
| 申请日期 | 1989-03-28 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/64942]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | OKI ELECTRIC IND CO LTD |
| 推荐引用方式 GB/T 7714 | SHINOZAKI KEISUKE,FURUKAWA RYOZO,WATANABE NOZOMI. Manufacture of integrated phase-locked laser device. JP1990253681A. 1990-10-12. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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