Detecting pinholes in vertical cavity surface-emitting laser passivation
文献类型：专利
| 作者 | DEBRABANDER, GREGORY N.; HERRICK, ROBERT W.; XIE, SUNING; SLATER, MATTHEW C. |
| 发表日期 | 2005-08-11 |
| 专利号 | US20050175051A1 |
| 著作权人 | AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD. |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Detecting pinholes in vertical cavity surface-emitting laser passivation |
| 英文摘要 | A method for detecting a passivation pinhole includes forming an oxide vertical cavity surface-emitting laser (VCSEL) having an oxidation cavity, forming a passivation layer over a surface of the oxidation cavity, exposing the oxide VCSEL to an etchant vapor, and inspecting the oxide VCSEL for a defect caused by the etchant vapor. |
| 公开日期 | 2005-08-11 |
| 申请日期 | 2005-03-31 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/65284]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD. |
| 推荐引用方式 GB/T 7714 | DEBRABANDER, GREGORY N.,HERRICK, ROBERT W.,XIE, SUNING,et al. Detecting pinholes in vertical cavity surface-emitting laser passivation. US20050175051A1. 2005-08-11. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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