以電介質鏡和自我對準增益指南製造垂直腔面發射擂射的方法和儀器
文献类型：专利
| 作者 | RICHARD A. SKOGMAN |
| 发表日期 | 2006-02-24 |
| 专利号 | HK1066104A |
| 著作权人 | FINISAR CORPORATION |
| 国家 | 中国香港 |
| 文献子类 | 发明申请 |
| 其他题名 | 以電介質鏡和自我對準增益指南製造垂直腔面發射擂射的方法和儀器 |
| 英文摘要 | The invention includes a method of fabricating a laser device, that includes: depositing a photoresist on epitaxially grown layers, patterning said photoresist to form an aperture area, depositing a dielectric material on said patterned photoresist, depositing a liftoff layer on said dielectric material, removing portions of said dielectric material and liftoff layer that border said aperture area, implanting regions of the epitaxially grown layers bordering said aperture area, and depositing a metal layer on said dielectric material. The invention also includes a device including: a substrate (12) comprising epitaxial layers (20) and an aperture area (13), a dielectric mirror (16) formed on top of said aperture area and an implanted region (15) within said epitaxial layers, said implanted region bordering said aperture area. |
| 公开日期 | 2006-02-24 |
| 申请日期 | 2004-10-20 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/65503]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | FINISAR CORPORATION |
| 推荐引用方式 GB/T 7714 | RICHARD A. SKOGMAN. 以電介質鏡和自我對準增益指南製造垂直腔面發射擂射的方法和儀器. HK1066104A. 2006-02-24. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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