中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Strain barrier quantum well semiconductor laser

文献类型:专利

作者YAMADA HIROHITO
发表日期1992-02-19
专利号JP1992049688A
著作权人NEC CORP
国家日本
文献子类发明申请
其他题名Strain barrier quantum well semiconductor laser
英文摘要PURPOSE:To achieve a uniform carrier injection operation and to obtain a quantum well laser whose modulation band is wide and whose oscillation spectrum width is narrow by a method wherein the lattice constant of a semiconductor forming a barrier layer is made smaller than the lattice constant of a substrate. CONSTITUTION:The manufacturing method is as follows: an n-InP buffer layer 14 is grown in 0.1mum on an n-InP substrate 15 by an MOVPE method; an In0.6 Ga0.4As0.6P0.4 barrier 12 composed of a composition whose lattice constant is by 0.5% smaller than that of InP is grown in 80 R; and an In0.53Ga0.47As well 13 is grown in 70Angstrom on it. The growth operation of the well and the barrier is repeated 10 times; and a 10-layer mutilple quantum well structure is manufactured. In addition, a p-InP clad layer 11 is grown in about 1mum on it. A multiple quantum well semiconductor wafer, having a strain barrier, which is manufactured in this manner is buried in a DC-PBH structure. Lastly, a p-side electrode and an n-side electrode are vapor-deposited.
公开日期1992-02-19
申请日期1990-06-19
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/65885]  
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
YAMADA HIROHITO. Strain barrier quantum well semiconductor laser. JP1992049688A. 1992-02-19.

入库方式: OAI收割

来源:西安光学精密机械研究所

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