Light emitting element having active waveguide and manufacture thereof
文献类型：专利
| 作者 | KURATA KAZUHIRO; SANO AKIZUMI; SUZUKI RYOJI; NAKAJO NAOKI; IKEGAMI HISAYA |
| 发表日期 | 1991-06-06 |
| 专利号 | JP1991133190A |
| 著作权人 | HITACHI CABLE LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Light emitting element having active waveguide and manufacture thereof |
| 英文摘要 | PURPOSE:To obtain a light emitting element having an active waveguide excellent in linearity, by forming a mesa stripe on a semiconductor substrate surface in the manner in which the top surface of a sectional shape constitutes a curved surface. CONSTITUTION:A photoresist mask 10 is arranged, as a mask, on the surface of a semiconductor substrate The substrate surface 1' is eliminated by photo etching, and a mesa stripe 1a having a trapezoidal section is formed. The photoresist film 10 is eliminated; the whole surface of the substrate 1 is chemically etched; thus the top surface part of the trapezoidal mesa stripe 1a is constituted as a curved surface. In this manner, the following are continuously epitaxially grown in order on the substrate 1; a current barrier layer 2 whose thickness does not exceed the height of the mesa stripe 1a, clad layers 3, 5 having a thickness which can sufficiently fill the top surface of the mesa stripe 1a, and an active layer 4. Thereby a light emitting element which has an active waveguide excellent is linearity and is excellent in light emitting characteristics can be obtained. |
| 公开日期 | 1991-06-06 |
| 申请日期 | 1989-10-19 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/65958]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | HITACHI CABLE LTD |
| 推荐引用方式 GB/T 7714 | KURATA KAZUHIRO,SANO AKIZUMI,SUZUKI RYOJI,et al. Light emitting element having active waveguide and manufacture thereof. JP1991133190A. 1991-06-06. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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