中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Distributed bragg reflection type semiconductor laser and manufacture thereof

文献类型:专利

作者IKEDA SOTOMITSU; MIYAZAWA SEIICHI
发表日期1990-02-26
专利号JP1990056985A
著作权人CANON INC
国家日本
文献子类发明申请
其他题名Distributed bragg reflection type semiconductor laser and manufacture thereof
英文摘要PURPOSE:To prepare a DBR laser by a small number of growth by a method wherein an optical guide is formed, a diffraction grating is cut while the current constriction layer of an active region is shaped, an active layer is laminated and the active layer and the optical guide are optically coupled on the same straight line. CONSTITUTION:A clad layer 2 and an optical guide layer 3 are epitaxial-grown on a substrate The pitches of a diffraction grating are brought to l.lambda/2 ((l)represents an integer and lambda an oscillation wavelength in an active layer). When a I section is masked previously at that time, the diffraction grating is shaped only in a III section. the active region section I is left as current constriction sections on both sides of a resonator, and the DBR section III section is manufactured while leaving a central section in order to be changed into the optical guide. A clad layer 4, the active layer 5, a clad layer 6 and a cap layer 7 are formed onto the substrate 1, and lastly an insulating film 8 such as SiO2 is shaped for forming a current injection window, and P side electrode Au 9 and N side electrode Au 10 are evaporated. Accordingly, a DBR laser oscillated at a stable single wavelength by a small number of growth can be acquired.
公开日期1990-02-26
申请日期1988-08-23
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/65965]  
专题半导体激光器专利数据库
作者单位CANON INC
推荐引用方式
GB/T 7714
IKEDA SOTOMITSU,MIYAZAWA SEIICHI. Distributed bragg reflection type semiconductor laser and manufacture thereof. JP1990056985A. 1990-02-26.

入库方式: OAI收割

来源:西安光学精密机械研究所

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