中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser element and modulation method

文献类型:专利

作者KAYANE NAOKI; UOMI KAZUHISA; OKAI MAKOTO
发表日期1991-02-12
专利号JP1991032081A
著作权人HITACHI LTD
国家日本
文献子类发明申请
其他题名Semiconductor laser element and modulation method
英文摘要PURPOSE:To enable high speed modulation by covering the periphery of an active layer with an organic insulating film and reducing parasitic capacitance outside the active region and leakage of modulated signals. CONSTITUTION:An active layer 2, a p-type InP clad layer 3, a cap layer 4 are successively grown on a substrate Then, a part including the active region 2 is left as it is and the periphery thereof is removed by etching, and a p-type InP layer 3 is again grown. Further, an organic insulating film 6 is applied, and evaporated to form an electrode metal element. Then the electrode metal in the central part of the element is removed to divide it into electrodes 7, 8 forming current injecting means. Since the periphery of the active layer 2 in this laser element is covered with the film 6, parasitic capacitance outside the active region 2 is reduced. When the current ratio at the electrode 7, 8 of the laser element is held at the predetermined value and a modulated signal is applied to the electrode 7 having low current value, good frequency characteristic can be obtained and high speed modulation is enabled.
公开日期1991-02-12
申请日期1989-06-29
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/66037]  
专题半导体激光器专利数据库
作者单位HITACHI LTD
推荐引用方式
GB/T 7714
KAYANE NAOKI,UOMI KAZUHISA,OKAI MAKOTO. Semiconductor laser element and modulation method. JP1991032081A. 1991-02-12.

入库方式: OAI收割

来源:西安光学精密机械研究所

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