中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor Optical Device Arrays

文献类型:专利

作者STEPHEN, JAMES, FASHAM; ANDREW, MICHAEL, TOMLINSON; CRAIG, TOMBLING; ANTHONY, EDWARD, KELLY
发表日期2004-02-11
专利号GB2391703A
著作权人KAMELIAN LIMITED
国家英国
文献子类发明申请
其他题名Semiconductor Optical Device Arrays
英文摘要A method of manufacturing an array of semiconductor optical devices, A1, A2 for example, semiconductor optical amplifiers, laser or detectors, in a single semiconductor chip to be optically coupled to an array which are optically coupled to an array of waveguides 12 arranged at a predetermined pitch is disclosed. The method comprises manufacturing an array of semiconductor optical devices A1, A2 as a plural number of interleaved sub-arrays A1, B1, C1 and A2, B2, C2 of semiconductor optical devices arranged, in each sub-array, at a pitch equal to the predetermined pitch. A substrate 10 having array of waveguides 12 arranged thereon at a predetermined pitch and having alignment features for aligning a semiconductor optical device with respect to the substrate 10 is also disclosed. The alignment features are repeated in an array comprising a plural number of interleaved sub-arrays of alignment features arranged, in each sub -array, at a pitch equal to the predetermined pitch. Finally, an array of semiconductor optical devices integrated in a single semiconductor chip, has the array of semiconductor optical devices arranged at a pitch equal to the predetermined pitch of an array of waveguides. The number of semiconductor optical devices is greater than the number of waveguides in the array of waveguides.
公开日期2004-02-11
申请日期2002-08-02
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/66110]  
专题半导体激光器专利数据库
作者单位KAMELIAN LIMITED
推荐引用方式
GB/T 7714
STEPHEN, JAMES, FASHAM,ANDREW, MICHAEL, TOMLINSON,CRAIG, TOMBLING,et al. Semiconductor Optical Device Arrays. GB2391703A. 2004-02-11.

入库方式: OAI收割

来源:西安光学精密机械研究所

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