中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser and production of it

文献类型:专利

作者KOMAZAKI IWAO
发表日期1992-06-05
专利号JP1992162484A
著作权人NEC CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser and production of it
英文摘要PURPOSE:To form a couple of regions at a time, realize simplification of process and obtain high reliability ratio and high efficiency without exposing an active layer by making smaller a In crystal mixing ratio of active layer on a semiconductor substrate having a mesa stripe in the vicinity of the end face of a resonator than that in the central area. CONSTITUTION:Stripes which are, for example, 3mum in width in the active region, 50mum in the window region, are formed on a substrate 1 with the coupling area of 50mum and depth of 2mum. Moreover, a clad layer 2, active layer 3, clad layer 4 and cap layer 5 are sequentially grown continuously. Next, a resist 6 is attached to the center of striped area and it is then etched leaving 0.3mum of the clad layer 4. Moreover, SiO2 insulating film 7 is provided to the entire part, except for the area on the mesa stripe. Finally, a P-type electrode 8 is provided to the surface and an N-type electrode 9 to the rear surface of substrate and the center of window region is cleavaged. The carrier injected from the P-type electrode 8 diffused only into the center area of stripe, In crystal mixing ratio included in the active layer changes in the form of a tapered area and mode control in the lateral direction of optical beam is kept stable even for high output operation period.
公开日期1992-06-05
申请日期1990-10-24
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/66224]  
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
KOMAZAKI IWAO. Semiconductor laser and production of it. JP1992162484A. 1992-06-05.

入库方式: OAI收割

来源:西安光学精密机械研究所

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