Microcavity semiconductor laser coupled to a waveguide
文献类型：专利
| 作者 | RICHARD, FRED V.; HOLM, PAIGE M. |
| 发表日期 | 2003-02-20 |
| 专利号 | US20030036217A1 |
| 著作权人 | MOTOROLA, INC. |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Microcavity semiconductor laser coupled to a waveguide |
| 英文摘要 | High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. One way to achieve the formation of a compliant substrate includes first growing an accommodating buffer layer on a silicon wafer. The accommodating buffer layer is a layer of monocrystalline oxide spaced apart from the silicon wafer by an amorphous interface layer of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. The foregoing is utilized for a microcavity semiconductor laser coupled to a waveguide. |
| 公开日期 | 2003-02-20 |
| 申请日期 | 2001-11-06 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/66228]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MOTOROLA, INC. |
| 推荐引用方式 GB/T 7714 | RICHARD, FRED V.,HOLM, PAIGE M.. Microcavity semiconductor laser coupled to a waveguide. US20030036217A1. 2003-02-20. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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