Method of Fabrication Polymer Waveguide
文献类型：专利
| 作者 | TSENG, CHUN-HAO; LEE, WAN-YU; CHEN, HAI-CHING; BAO, TIEN-L |
| 发表日期 | 2015-09-10 |
| 专利号 | US20150253500A1 |
| 著作权人 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Method of Fabrication Polymer Waveguide |
| 英文摘要 | A method of fabricating a waveguide device is disclosed. The method includes providing a substrate having an elector-interconnection region and a waveguide region and forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region. The method also includes bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack. A reflecting-mirror trench is formed in the substrate in the waveguide region, and a reflecting layer is formed over a reflecting-mirror region inside the waveguide region. The method further includes forming and patterning a bottom cladding layer in a wave-tunnel region inside the waveguide region and forming and patterning a core layer and a top cladding layer in the waveguide region. |
| 公开日期 | 2015-09-10 |
| 申请日期 | 2015-05-18 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/66373]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 推荐引用方式 GB/T 7714 | TSENG, CHUN-HAO,LEE, WAN-YU,CHEN, HAI-CHING,et al. Method of Fabrication Polymer Waveguide. US20150253500A1. 2015-09-10. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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