中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Planar index guided VCSEL

文献类型:专利

作者SEONGSIN, KIM; WILSON, H, WIDJAJA; SUNING, XIE
发表日期2003-09-24
专利号GB2386756A
著作权人AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD
国家英国
文献子类发明申请
其他题名Planar index guided VCSEL
英文摘要Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELs) 10 are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes 26 that are used to form the index-guiding confinement regions (28). In one aspect, a VCSEL 10 includes a vertical stack structure having a substantially planar top surface. The vertical stack structure includes a top mirror (14), a bottom mirror (16), and a cavity region (12) disposed between the top mirror (14) and the bottom mirror (16) and including an active light generation region (20). At least one of the top mirror (14) and the bottom mirror (16) has a layer with a peripheral region (28) that is oxidized into an electrical insulator as a result of exposure to an oxidizing agent.; The vertical stack structure defines two or more etched holes 26 each extending from the substantially planar top surface to the oxidized peripheral region (28). Each of the etched holes 26 is moisture passivated by an overlying moisture penetration barrier 40.
公开日期2003-09-24
申请日期2002-12-05
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/66521]  
专题半导体激光器专利数据库
作者单位AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD
推荐引用方式
GB/T 7714
SEONGSIN, KIM,WILSON, H, WIDJAJA,SUNING, XIE. Planar index guided VCSEL. GB2386756A. 2003-09-24.

入库方式: OAI收割

来源:西安光学精密机械研究所

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