Patterned phase shift layers for wavelength-selectable vertical-cavity surface-emitting laser (VCSEL) arrays
文献类型：专利
| 作者 | HWANG, WEN-YEN; ANSELM, KLAUS, ALEXANDER; ZHENG, JUN; BAILLARGEON, JAMES, N. |
| 发表日期 | 2002-06-13 |
| 专利号 | WO2002047128A1 |
| 著作权人 | APPLIED OPTOELECTRONICS, INC. |
| 国家 | 世界知识产权组织 |
| 文献子类 | 发明申请 |
| 其他题名 | Patterned phase shift layers for wavelength-selectable vertical-cavity surface-emitting laser (VCSEL) arrays |
| 英文摘要 | A method is provided, the method comprising forming a first of n masking layers (1165) for a device (900) and forming a first of nphase-shift layers (970) for the device (900) using the first of the n masking layers (1165). The method also comprises forming a second of n masking layers (1165) for a device (900), and forming a second of n phase-shift layers (1070) for the device (900) using the second of the n masking layers (1165) and forming at least n + 1 and at most 2" different optical thicknesses for the device (900) using the n masking layers (1165) and the n phase-shift layers (1170). |
| 公开日期 | 2002-06-13 |
| 申请日期 | 2001-12-05 |
| 状态 | 未确认 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/66671]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | APPLIED OPTOELECTRONICS, INC. |
| 推荐引用方式 GB/T 7714 | HWANG, WEN-YEN,ANSELM, KLAUS, ALEXANDER,ZHENG, JUN,et al. Patterned phase shift layers for wavelength-selectable vertical-cavity surface-emitting laser (VCSEL) arrays. WO2002047128A1. 2002-06-13. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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