Manufacture of light emitting element and evaluating method therefor
文献类型：专利
| 作者 | YAMADA MASAHITO; TAKENAKA TAKUO; TAKAHASHI MASANORI |
| 发表日期 | 1992-11-26 |
| 专利号 | JP1992340287A |
| 著作权人 | SHIN ETSU HANDOTAI CO LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Manufacture of light emitting element and evaluating method therefor |
| 英文摘要 | PURPOSE:To form a light emitting element having a p-n junction at a deep position by etching a semiconductor wafer with bromomethanol solution through an opening to form a U-shaped sectional groove, and separating light emitting elements by dicing, etc. CONSTITUTION:N-type electrodes 4 made of gold-based electrodes are individually separated to be formed on an upper surface of an epitaxial wafer 2 having a p-type layer and an n-type layer. A p-type gold-based electrode 6 is formed on an entire lower surface of the wafer 2. An n-type resist film 4a covering to enclose the electrodes 4 and a p-type resist film 6a covering the electrode 6 are formed. U-shaped sectional grooves are etched with bromomethanol until it reaches a p-n junction, and the n-type electrodes are so electrically separated as to perform an automatic probing of respective light emitting elements. The film 4a and the film 6a are peeled. Light emitting performances of all the elements are evaluated by an automatic prober. The elements are diced along the grooves to completely separate to form the respective elements. |
| 公开日期 | 1992-11-26 |
| 申请日期 | 1991-01-22 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/67431]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SHIN ETSU HANDOTAI CO LTD |
| 推荐引用方式 GB/T 7714 | YAMADA MASAHITO,TAKENAKA TAKUO,TAKAHASHI MASANORI. Manufacture of light emitting element and evaluating method therefor. JP1992340287A. 1992-11-26. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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