Integrated waveguide device and fabricating method thereof
文献类型：专利
| 作者 | KATSUHIKO GOTO |
| 发表日期 | 1996-04-24 |
| 专利号 | GB2294361A |
| 著作权人 | MITSUBISHI DENKI KABUSHIKI KAISHA |
| 国家 | 英国 |
| 文献子类 | 发明申请 |
| 其他题名 | Integrated waveguide device and fabricating method thereof |
| 英文摘要 | A method of fabricating an integrated waveguide device includes forming a ridge having a width that varies in a tapered shape along the [011] direction on a semiconductor substrate and growing a laminated layer structure including a light waveguide layer where the width varies in a tapered shape of the ridge so that a waveguide has a tapered shape in the laminated layer structure, thereby producing an integrated waveguide device having a tapered light waveguide. The thickness of the semiconductor layer and the wavelength guided by the waveguide are controlled with high precision and the reliability of the device is enhanced. |
| 公开日期 | 1996-04-24 |
| 申请日期 | 1995-10-16 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/67628]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MITSUBISHI DENKI KABUSHIKI KAISHA |
| 推荐引用方式 GB/T 7714 | KATSUHIKO GOTO. Integrated waveguide device and fabricating method thereof. GB2294361A. 1996-04-24. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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