Molecular crystal optical element and its manufacture
文献类型:专利
作者 | TERUI HIROSHI; TOMARU AKIRA; KOBAYASHI MORIO; EDAHIRO TAKAO |
发表日期 | 1984-09-20 |
专利号 | JP1984166922A |
著作权人 | NIPPON DENSHIN DENWA KOSHA |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Molecular crystal optical element and its manufacture |
英文摘要 | PURPOSE:To obtain an integrated element on the same substrate by packing a molecular crystal in a tunnel formed at a prescribed position on an optical waveguide element substrate. CONSTITUTION:A metallic film 2' of Al, etc. is stuck onto a plate-shaped optical waveguide 4 (for instance, Ti diffused LiNbO3) laminated on a substrate 3, and the metallic film 2' of a position of both side parts of a tunnel 5 to be formed is removed by a lithographic process. Subsequently, a tunnel forming substance (SiO2 and others) is stuck by leaving one end (a part of the corner) except the tunnel part on the metallic film 2'. When the metallic film 2' is immersed into an etching liquid, the metallic film 2' is removed from the part on which the tunnel forming substance 5 is not stuck, the substance 5 on the metallic film 2' is removed from the part except both the side parts of the tunnel and a roof part laid across said parts, and the tunnel 5 is formed. An optical element is formed by packing a melted molecular crystal material 2 in the tunnel 5, and growing a crystal by slow cooling. |
公开日期 | 1984-09-20 |
申请日期 | 1983-03-14 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/67684] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | NIPPON DENSHIN DENWA KOSHA |
推荐引用方式 GB/T 7714 | TERUI HIROSHI,TOMARU AKIRA,KOBAYASHI MORIO,et al. Molecular crystal optical element and its manufacture. JP1984166922A. 1984-09-20. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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