中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Molecular crystal optical element and its manufacture

文献类型:专利

作者TERUI HIROSHI; TOMARU AKIRA; KOBAYASHI MORIO; EDAHIRO TAKAO
发表日期1984-09-20
专利号JP1984166922A
著作权人NIPPON DENSHIN DENWA KOSHA
国家日本
文献子类发明申请
其他题名Molecular crystal optical element and its manufacture
英文摘要PURPOSE:To obtain an integrated element on the same substrate by packing a molecular crystal in a tunnel formed at a prescribed position on an optical waveguide element substrate. CONSTITUTION:A metallic film 2' of Al, etc. is stuck onto a plate-shaped optical waveguide 4 (for instance, Ti diffused LiNbO3) laminated on a substrate 3, and the metallic film 2' of a position of both side parts of a tunnel 5 to be formed is removed by a lithographic process. Subsequently, a tunnel forming substance (SiO2 and others) is stuck by leaving one end (a part of the corner) except the tunnel part on the metallic film 2'. When the metallic film 2' is immersed into an etching liquid, the metallic film 2' is removed from the part on which the tunnel forming substance 5 is not stuck, the substance 5 on the metallic film 2' is removed from the part except both the side parts of the tunnel and a roof part laid across said parts, and the tunnel 5 is formed. An optical element is formed by packing a melted molecular crystal material 2 in the tunnel 5, and growing a crystal by slow cooling.
公开日期1984-09-20
申请日期1983-03-14
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/67684]  
专题半导体激光器专利数据库
作者单位NIPPON DENSHIN DENWA KOSHA
推荐引用方式
GB/T 7714
TERUI HIROSHI,TOMARU AKIRA,KOBAYASHI MORIO,et al. Molecular crystal optical element and its manufacture. JP1984166922A. 1984-09-20.

入库方式: OAI收割

来源:西安光学精密机械研究所

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