Manufacture of ridge laser
文献类型：专利
| 作者 | ONOUCHI TOSHIHIKO; NOJIRI HIDEAKI |
| 发表日期 | 1991-07-17 |
| 专利号 | JP1991165086A |
| 著作权人 | CANON INC |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Manufacture of ridge laser |
| 英文摘要 | PURPOSE:To manufacture a highly reliable ridge laser efficiently by providing an AlGaAs mask layer into a stripe shape on a GaAs contact layer and dissolving parts other than a part that is formed into the stripe shape by liquid phase epitaxy and providing to a protrusion. CONSTITUTION:An n-type GaAs buffer layer 2, an n-type AlGaAs clad layer 3, a nondoped AlGaAs active layer 4, a p-type AlGaAs clad layer 5, a p-type GaAs contact layer 6, an non-doped AlGaAs mask layer 7 grow one after another on a GaAs substrate After patterning a part where a ridge is formed, the AlGaAs mask layer 7 is left into a stripe shape as far as a width that is desired to leave as a protrusion by the use of a hydrochloric acid plus hydrogen peroxide etchant which has AlGaAs/GaAs selectivity. In other parts except the left mask layer 7, the GaAs contact layer 6 is exposed to outside. Subsequently, the contact layer 6 is allowed to come into contact with a Ga melt by liquid phase epitaxy and then, a ridge part 8 is formed by dissolving as far as a part where the GaAs contact layer 6 is exposed in the direction of depth. |
| 公开日期 | 1991-07-17 |
| 申请日期 | 1989-11-24 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/67823]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CANON INC |
| 推荐引用方式 GB/T 7714 | ONOUCHI TOSHIHIKO,NOJIRI HIDEAKI. Manufacture of ridge laser. JP1991165086A. 1991-07-17. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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