中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
光ピックアップ装置

文献类型:专利

作者浜田 健; 清水 裕一
发表日期1996-12-05
专利号JP2586578B2
著作权人松下電器産業株式会社
国家日本
文献子类授权发明
其他题名光ピックアップ装置
英文摘要PURPOSE:To control the position of respective components by integrating monolithicly a semiconductor laser, a detector, a hologram element and a lens on the same chip. CONSTITUTION:Etching is executed to a wafer, three parts of a laser part 9, a detector part 9 and a reflecting part 11 are formed, both active layers (A) and (B) remain at a detector part 10 and an active layer (A) of a lower part only remains by the laser part 9. The side surface of the laser part 9 and the detector part 10 becomes vertical, the reflecting part 11 has the inclina tion of 45 deg. and as such, the etching is executed. At the side surface of the reflecting part, a lattice-shaped metallic film is thickly formed, a reflecting type hologram optical element 13 is obtained, SiO212 is thickly formed only the wafer, a Fresnel collimator lens 14 is formed on the surface and a monolith ic hologram optical pickup is obtained. Thus, with the technology of the lithogra phy, the position of respective optical parts can be controlled with a sufficient high accuracy.
公开日期1997-03-05
申请日期1988-05-31
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/68994]  
专题半导体激光器专利数据库
作者单位松下電器産業株式会社
推荐引用方式
GB/T 7714
浜田 健,清水 裕一. 光ピックアップ装置. JP2586578B2. 1996-12-05.

入库方式: OAI收割

来源:西安光学精密机械研究所

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