中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者IWASAKI TAMOTSU; IKOMA TOSHIAKI; OKUMURA JITOKU
发表日期1985-06-04
专利号JP1985100489A
著作权人FURUKAWA DENKI KOGYO KK
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To obtain a semiconductor laser which has a reflecting surface including a stable quality, excellent flatness and high reflectivity by forming the reflecting surface of a rosonator of a solid phase reactive product of an element for forming a compound semiconductor and a metal. CONSTITUTION:An active layer 23 of III-V Group compound semiconductor is prepared, and the reflecting surfaces 34A, 34B of a resonator are formed of a solid phase reactive product of one or more elements for forming the III-V Group compound semiconductor and a metal for producing a compound having the chemical equivalent composition upon reacting with the elements. For example, an N type GaAlAs layer 22, an N type GaAs active layer 23 and an N type GaAlAs layer 24 are sequentially crystallized and grown on an N type GaAs substrate 21, an SiO2 insulating film 25 is formed, a hole 27 is opened, Zn is diffused from the hole 27, thereby converting part of the layers 24, 23, 22 into P type layers 28, 29, 30. then, electrodes 32, 33 are formed, cut by a dicing machine, the cut surfaces are etched, Pt is bonded to the surfaces, solid phase reaction is performed at 400 deg.C, thereby forming a solid phase reactive product 34.
公开日期1985-06-04
申请日期1983-08-02
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/70525]  
专题半导体激光器专利数据库
作者单位FURUKAWA DENKI KOGYO KK
推荐引用方式
GB/T 7714
IWASAKI TAMOTSU,IKOMA TOSHIAKI,OKUMURA JITOKU. Semiconductor laser. JP1985100489A. 1985-06-04.

入库方式: OAI收割

来源:西安光学精密机械研究所

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