Semiconductor laser diode device
文献类型：专利
| 作者 | OOTA YUTAKA; SAITO YOSHITO; YOSHIMURA KAZUNORI |
| 发表日期 | 1986-08-06 |
| 专利号 | JP1986174791A |
| 著作权人 | OKI ELECTRIC IND CO LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Semiconductor laser diode device |
| 英文摘要 | PURPOSE:To prevent misalignment of the center of a chip and an active layer, by providing one or more recognizing parts of the position of the active layer on the surface opposite to the surface of a semiconductor laser chip, on which the active layer is located. CONSTITUTION:Photoresist is applied on the surface opposite to the side of a laser chip 2, on which an active layer is located. Electrode evaporating machining of the laser chip 2 has been already finished. With the active layer, which can be observed from the lower surface as a reference, recess patterns for recognizing parts 13 are mask-aligned on the upper surface. Then exposing and development are performed. The surfaces are etched by iodine liquid. The recognizing parts, each having a longitudinal length of 2-20mum, a lateral length of about 2mum and a depth of about 5mum, are formed. A sub-mount 1, on which a laser chip 2 is bonded, is bonded to a mount 20, on which making lines 21 and 22 are provided. Position alignment is carried out so that the recognizing parts 13 are located directly over the marking line 22 and the marking line 21 is perpendicular to the recognizing parts 13 by using a microscope. Thus position accuracy of less than 1mum in the X and Y directions and that of less than one degree in the theta direction can be obtained. Assembling is always carried out with respect to the reference position of the active layer, and stable position accuracy is obtained. |
| 公开日期 | 1986-08-06 |
| 申请日期 | 1985-01-30 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/70622]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | OKI ELECTRIC IND CO LTD |
| 推荐引用方式 GB/T 7714 | OOTA YUTAKA,SAITO YOSHITO,YOSHIMURA KAZUNORI. Semiconductor laser diode device. JP1986174791A. 1986-08-06. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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