Semiconductor device
文献类型：专利
| 作者 | JUN, CHI HOON; NA, JEHO; JUNG, DONG YUN; KO, SANG CHOON; NAM, EUN SOO; LEE, HYUNG SEOK |
| 发表日期 | 2017-04-04 |
| 专利号 | US9613884 |
| 著作权人 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Semiconductor device |
| 英文摘要 | Provided is a semiconductor device. The semiconductor device includes a substrate including a cantilever configured to generate a flow of cooling media through dynamic movement, an active area on the substrate which an electronic device is provided on, an insulation layer disposed to be spaced apart from the active area on the substrate, a lower electrode on the insulation layer, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film. |
| 公开日期 | 2017-04-04 |
| 申请日期 | 2015-10-01 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/72293]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 推荐引用方式 GB/T 7714 | JUN, CHI HOON,NA, JEHO,JUNG, DONG YUN,et al. Semiconductor device. US9613884. 2017-04-04. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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