中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者NISHIMOTO HIROYUKI
发表日期1990-12-04
专利号JP1990292884A
著作权人NEC CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To effectively concentrate a high frequency current on an active layer to enable a semiconductor laser device of this design to execute a super- high speed modulation by a method wherein a part other than the vicinity of a light emitting region is covered with a high resistance semiconductor layer or the like. CONSTITUTION:An InP high resistance layer 9 is laminated on an N-InP substrate 1, the InP high resistance layer 9 is removed leaving a part of it unremoved so as to expose the N-InP substrate 1 for the formation of an inverted mesa-shaped step. An N-InP buffer layer 2, an InGaAsP active layer 3, a P-InP clad layer 4, and a P-InAsGaP contact layer 5 are successively laminated on the P-InP substrate 1 bringing the ends of them into contact with the inverted mesa-shaped step. The other ends of the InGaAsP active layer 3, the P-InP clad layer 4, and the P-InGaAsP contact layer 5 are etched to form a continuous reverse mesa-shaped step. As the InGaAsP active layer 3 is surrounded with a high resistance semiconductor layer or air, nearly all the signal current injected from a P-side electrode 7 is made to flow through the InGaAsP active layer, and consequently a semiconductor laser device of this design has a structure excellent in response characteristic to high frequency.
公开日期1990-12-04
申请日期1989-05-02
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/73751]  
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
NISHIMOTO HIROYUKI. Semiconductor laser device. JP1990292884A. 1990-12-04.

入库方式: OAI收割

来源:西安光学精密机械研究所

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