Optical integrated circuit
文献类型：专利
| 作者 | MATSUDA KENICHI; FUJITA TOSHIHIRO; OUYA JIYUN; SERIZAWA AKIMOTO |
| 发表日期 | 1986-07-26 |
| 专利号 | JP1986166193A |
| 著作权人 | MATSUSHITA ELECTRIC IND CO LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Optical integrated circuit |
| 英文摘要 | PURPOSE:To freely set the positional relationship by forming a mounting layer on the entire surface of an active layer and photoguide layer, then etching in a stripe shape to form a striped mounting layer and an active layer as function photoelements so that the striped mounting layer and the photoguide layer become 3-dimensional photowave guide. CONSTITUTION:An n-type InGaAsP photoguide layer 23, an n-type InP mounting layer 24, an n-type InGaAsP active layer 25, a p-type mounting layer 26, and p-type InGaAsP cap layer 27 are epitaxially grown on a stepped n-type InP substrate 22. An insulating film 30 is formed, with the film as a mask the layers 27, 26 are etched. Further, a striped insulating film 31 is formed, with the film 31 as a mask the layers 27, 26 of a semiconductor layer 28 and the layers 25, 24 of a photowave guide 29 are etched. In the guide 29, the layer 25 operates as a cap layer, and the layers 25, 26 are inverted to p-type if Zn vapor phase diffusion is formed before forming the insulating film. Thus, an active photoelement and 3-dimensional photowave guide are integrated, the positional relationship is not limited and the manufacture can be readily performed. |
| 公开日期 | 1986-07-26 |
| 申请日期 | 1985-01-18 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/73783]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MATSUSHITA ELECTRIC IND CO LTD |
| 推荐引用方式 GB/T 7714 | MATSUDA KENICHI,FUJITA TOSHIHIRO,OUYA JIYUN,et al. Optical integrated circuit. JP1986166193A. 1986-07-26. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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